3511 層状材料のナノ加工特性

概要

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In this study, we evaluated the atomic scale processing of a material with a layered crystal structure, based on topographic changes caused by sliding. Materials with layered crystal structures, such as molybdenum disulfide, graphite and muscovite mica, have basal planes with weak interaction; therefore, the surface of these materials is easily cleaved and observed on the atomic scale. Processing mainly occurs to a depth of about one nm in the mica surface, corresponding to the depth from the surface of one cleavage plane to the surface of the cleavage plane immediately beneath it. By applying this mechanism, high-precision processing such as line and space and cross grooves can be performed in a period unit of a multilayered crystal material which has periodic weak van der Waals bonds.
一般社団法人日本機械学会の論文
2000-07-31