炭素/窒化ホウ素固体潤滑超格子膜の形成とそのトライボロジー特性(機械要素,潤滑,工作,生産管理など)

概要

論文の詳細を見る
Carbon and boron nitride superlattice films were deposited by RF sputtering using two semicircular targets. Superlattice (C/BN)n films were deposited by controlling the opposing time of the substrate to each of the graphite and boron nitride semicircular targets. Micro-Vickers hardness, nanoindentation hardness and nanoscratching properties of these films were evaluated. Both micro-Vickers and nanoindentation hardnesses of the 4nm-period (C/BN)n multilayered film are the highest of all (C/BN)n films. Multilayered film of a suitable period has superior hardness and nanoscratching resistance. From the nanoscratching test evaluation, oscillatory scratching test, and ball-on-disk tribo test, the friction of the 4nm-period (C/BN)n multilayered film is lower than those of other (G/BN)n, carbon, boron nitride and carbon nitride films. The 4nm-period (C/BN)n multilayered films show the least damage and superior sliding endurance.
一般社団法人日本機械学会の論文
2002-04-25