窒素イオン注入シリコンのマイクロ・メゾ・マクロトライボロジー特性

概要

論文の詳細を見る
In the use of micromachines, the scale of the machine is sufficiently small that microwear influences the machine properties. Since the most common material used in microfabrication processes is silicon, it is important to study its surface modification characteristics. In an attempt to improve the tribological properties of silicon, the effects of N^+ implantation at various ion energies on the tribological properties were evaluated using a tribometer for the three cases of μN, mN and N loads. With microload (μN), N^+ implantation at the lowest ion energy can result in a decrease in microwear, as evaluated by atomic force microscope. In contrast, N^+ implantation at higher ion energy is more effective for decreasing friction and increasing the critical contact stress than N^+ implantation at lower ion energy, with mesoload (mN) and macroload (N), evaluated using an oscillatory friction tester and a reciprocating friction tester, respectively. These results are attributed to the relationship between the depth of implanted N^+ and maximum shear stress of elastic contact between spherical and planar surfaces.
一般社団法人日本機械学会の論文
1995-12-25