各種硬質膜形成チップによる微細加工とそのナノスライダへの応用

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To realize precise atomic-scale mechanical processing using the AFM tip, wear of the tip must be reduced. An atomic-scale wear-resistant tip coated with hard films was fabricated. To produce the 1-nm-deep nanoslider, the processing properties of lines and spaces, and cross grooves fabricated on a layered crystalline muscovite mica surface using a cubic boron nitride (cBN), diamond-1ike carbon (DLC), titanium nitride (TiN) coated and silicon tips (radius less than 50 nm) were investigated. Fundamental profile processing properties of lines and spaces were evaluated at first. To clarify how narrowly a line interval can be processed, the processing period of lines and spaces was changed under the conditions at which mica with a 1-nm-deep groove can be formed. cBN coated tip enables more precise and finer processing than the other tip, and can yield nearly 1-nm-deep grooves at 50 nm periods. To form nanosliders supported by van der Waals force, narrow lattice grooves were processed using a CBN coated tip. By these processes, nanometer scale sliders with a nearly 50-nm-square area supported by van der Waals force, have been created. The behaviour of nanometer scale sliders after tip actlon is evaluated by examining the surface profile change. At a low load, a cluster of atoms on the central part of a nanometer dot moved to right by shearing at adepth of 0.7nm, and were transported partially and irregularly. At a high load, most of the dots, acted upon by the tip, moved as one body.
公益社団法人精密工学会の論文
2000-08-05

各種硬質膜形成チップによる微細加工とそのナノスライダへの応用

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