ボロン,炭素,窒素三元素系硬質薄膜の形成とそのトライボロジー特性

概要

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Hard B-C-N mixed films were deposited by radio frequency (RF) sputtering using both hexagonal boron nitride (BN) and graphite (C) semicircular tareets. Vickers hardness, nano-indentation hardness and microwear resistance were evaluated. (1) The hardness of B-C-N mixed film is higher than that of C-N and B-N films. New hard B-C-N films were obtained under proper bias voltage and flow rate conditions. (2) Nano-indentation hardness showed similar results as Vickers hardness. Nano-indentation clarified the value on the hardness of the thin film, although Vickers hardness was influenced by the hardness of the substrate. (3)Microwear tests using an atomic force microscope demonstrated the excellent microwear resistance of B-C-N material element mixed film.
一般社団法人日本機械学会の論文
1999-07-25