窒化炭素/窒化ホウ素超格子積層膜の形成とそのマイクロトライボロジー特性

概要

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Carbon nitride and boron nitride super lattice films were deposited by RF sputtering using two semicircular targets, and then Vickers, nanoindentation hardness and micro-wear resistance of these films were evaluated. (1) Super lattice films were deposited by control of the oppositing time of substrate to each graphite and boron nitride semicircular targets respectively. Super lattice layered structure was observed by TEM (Transmittance Electron Microscope). (2) The Vickers and nanoindentation hardness of the multi layered films change with layer period. The hardness of multi layered film with 4 nm period is the highest. (3) Micro wear properties of multi layered and mixed films are evaluated by using AFM. Wear resistance showed a similar tendency as a nanoindentation hardness results. The wear depth of multi layered film of 4 nm period is the lowest. Proper period multi layered film has superior microwear resistance. (4) The multi layered film composed of same thickness of CN and BN layers is higher than that of the layered film composed of different thick CN and BN multi layers. (5) Hardness and micro wear properties dependence on the order of multi layered film were evaluated. The super lattice film which has the CN top surface layer is higher hardness and wear resistant than those of the film which has the BN top surface.
一般社団法人日本機械学会の論文
1999-11-25