板ガラスのレーザブレーキングに関する研究(第2報) : CO_2レーザ光照射条件の検討

概要

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A method to break glass plate was proposed for substrates of display panel by CO_2 laser beam heating. Generally, glass plate is broken by growing micro-crack which is generated during scribing from tip of a chisel under optimum load. And then. the generated micro-cracks are grown by mechanical force applied to the scribed trace. For laser braking, the micro-crack is grown by tensile stress due to thermal expansion which arises from temperature rise by a CO_2 laser beam irradiation onto the scribed trace instead of applying mechanical force. This paper deals with experimental results of the optimum laser irradiating condition and discussion of the laser breaking mechanisms. It was possible to break the glass plate finely and precisely without applying mechanical force at the same scribing velocity.
公益社団法人精密工学会の論文
2000-02-05