ファインセラミックスのフォトエッチング : 高温りん酸によるエッチング

概要

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The compositions of hot phosphoric acid between 200 and 320℃ under refluxing and non-refluxing (open) conditions were studied by means of the paper chromatography and the colorimetric analysis. The etch rates of various ceramics were measured in the acid under several conditions. The composition of the non-refluxed open acid varied with time due to dehydration and condensation. On the other hand, refluxing water vapor during heating provided a good etching condition in which the temperature and composition of the acid were maintained constant. Under refluxing condition, two types of phosphoric acid were available ; a boiling acid and an equi-composition acid. In the refluxed acids, the etch rates of ceramics were increased with temperature. Alumina ceramic had an etch rate of several μm/min at temperatures above 250℃ in the refluxed boiling acid. The etch rates for the equi-composition acid was lower than those for the boiling acid at the same temperature, due to a higher degree of condensation for the equi-composition acid. The etch rate of alumina ceramic was also increased with the concentration of orthophosphoric acid.
公益社団法人精密工学会の論文
1989-06-05