能動空気軸受 : 浮上方向の位置と振動の超精密制御

概要

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This paper introduces an active air bearing. In the conventional passive type, for example, in an air slide, a table is supported by the pressurized air film which can be considered as a spring and damper system. Thus, disturbances, i. e. various kinds of external force cause the table vibration as well as the change of the air film thickness and that of the table floating position. Moreover, motion accuracy of the table depends on accuracy of guideways. These suggest necessity of a mechanism capable of floating position and vibration control of an object. In the active air bearing, a PZT actuator is used for controlling floating characteristics; floating position and vibration of the object. The actuator is arranged in series to the air film not to damage its property; free of mechanical contact. Two degrees of freedom control system (PID-PD or PID-PDD^2) is adopted for obtaining desired characteristics of floating position control and active damping of vibration. In experiments, a 9kg mass object is floated under control with 20nm vibration amplitude, and is positioned with 20nm positioning accuracy, 500Hz bandwidth and no-overshoot.
公益社団法人精密工学会の論文
1988-02-05