遊離微粒子加工を援用したマイクロ形状加工技術の開発(第1報) : 加工原理と光通信部品への適用

概要

論文の詳細を見る
A new machining method was developed to produce micro-scale shapes for optical devices. This method containes a high-speed rotating microblade and high-speed fine particles that are accelerated by the rotating blade. With this method it is possible to obtain a smooth and undamaged surface at the same time that the micro-shape is machined. The fine particles allow a rather large amount of material to be machined very near the blade. They also enhanced cutting where the blade contacts the material. This method was applied to make an in-line optical micro-filter and a hemispherical end fiber. These'devices performed well with an insertion loss of 0.21 dB for the microfilter and a coupling loss of 2-3 dB for the hemispherical end fiber.
公益社団法人精密工学会の論文
1998-01-05