高精度な直線運動に関する研究(第3報) : 5自由制御直動システム

概要

論文の詳細を見る
A machine table has five kinds of straight motion errors, when it moves along a reference. Those are the errors of the vertical and horizontal positions, and the pitch, roll and yaw angle attitude errors. In this system, a steel block is floated and retained by some air pads. The block and the pads are mounted on a conventional mechanical sliding table. The straight motion errors of the block are detected by some optical and electronic devices. Then the block is controlled in its positions and angle attitudes by changing the supply pressure to each pad so that the block moves straightly. The working length of the system is 1000mm and the maximum working speed is 250mm/min. The errors of the positions against reference are less than 0.1μm and the changes of attitudes are less than 0.2 sec of arc.
公益社団法人精密工学会の論文
1985-12-05