スライディングモードの補償機能を備えた高速・高精度位置制御

概要

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To achieve high-speed and high-precision position control for semiconductor product machines and industrial robots, the full-closed feedback control is applied. Many control methods have been proposed for such a system. In general, P,PI/I-PI control which is one of PID control is applied to a lot of industrial applications. However, in case of changing mechanical characters of control target, the parameters of P,PI/I-PI control have to be changed for keeping a good motion performance. In this paper, we propose a new P,PI/I-P control method which is with nonlinear compensator. The algorithm of nonlinear compensator is based on sliding mode control with chattering compensation. The effectiveness of proposed control method is evaluated by using full-closed single axis slider system via point to point control and contour control in the case of changing load. From the experimental results, the proposed control method has robustness in the case of changing acceleration/deceleration of control reference, changing load and low velocity contouring motion.
社団法人電気学会の論文
2008-09-01