速度予測方式を用いた高速・高精度位置決め応答

概要

論文の詳細を見る
This paper proposes the high-speed and high-precision position control for industrial machines and semiconductor products using predictive velocity method. In order to achieve high-speed and high-precision response, the high gain feedback is ordinary method. With the high gain parameters, the delay of detection of position signal may cause some machine vibration. Therefore, the detection delay has to be compensated to get high gains. In the proposed method, the phase of predictive velocity signal is forwarded and the predictive velocity signal maintains good accuracy, since the predictive velocity signal is calculated with position signal, torque reference and the dynamics model of the machine. This method is easily adapted to P, I-P controller. The proposed method was verified by the simulations and the experiment results with one axis slider with the high gain feedback parameters. Moreover, the position reference response and the position disturbance response were greatly improved by using this method.
社団法人精密工学会の論文
2005-10-05