Improvement of mobility and NBTI reliability in MOSFETs with ALD-Si-nitride/SiO_2 stack dielectrics and p^+-poly-Si gate
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Zhu Shiyang
Research Center For Nanodevices And Systems Hiroshima University
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Nakajima Anri
Research Center For Nanodevices And Systems Hiroshima University
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Miyake Hideharu
Elpida Memory Inc.
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Ohashi Takuo
Elpida Memory Inc.
関連論文
- Improvement of mobility and NBTI reliability in MOSFETs with ALD-Si-nitride/SiO_2 stack dielectrics and p^+-poly-Si gate
- Bipolar Voltage Pulse Induced Current : A Means for Reliable Extraction of Interface Trap Distribution in Ultrathin Oxides MOS Structures
- Fabrication Technologies for Double-SiO_2-Barrier Metal-Oxide-Semiconductor Transistor with a Poly-Si Dot
- Calculation of Electrical Properties of Novel Double-Barrier Metal Oxide Semiconductor Transistors
- Carrier Mobility in Metal-Oxide-Semiconductor Field Effect Transistor with Atomic-Layer-Deposited Si-Nitride Gate Dielectrics
- Conduction Mechanism in Extremely Thin Poly-Si Wires : Width Dependence of Coulomb Blockade Effect
- Low-Temperature Selective Deposition of Silicon by Time-Modulation Exposure of Disilane and Formation of Silicon Nanowires
- Fabrication of Si Nanowire Field-Effect Transistor for Highly Sensitive, Label-Free Biosensing
- Influence of bulk bias on NBTI of pMOSFETs with ultrathin SiON gate dielectric
- Modified Direct-Current Current-Voltage Method for Interface Trap Density Extraction in Metal-Oxide-Semiconductor Field-Effect-Transistor with Tunneling Gate Dielectrics at High Temperature
- Room Temperature Operation of an Exclusive-OR Circuit Using a Highly-Doped Si Single-Electron Transistor
- Self-Limiting Atomic-Layer Selective Deposition of Silicon Nitride by Temperature-Controlled Method
- Application of Highly-Doped Si Single-Electron Transistors to an Exclusive-NOR Operation
- Silicon Single-Electron Memory Having in-Plane Dot with Double Gates
- Improvement in Mobility and Negative-Bias Temperature Instability in Metal–Oxide–Semiconductor Field-Effect Transistors with Atomic-Layer-Deposited Si–Nitride/SiO2 Stack Dielectrics
- In-Plane Grain Orientation Alignment of Polycrystalline Silicon Films by Normal and Oblique-Angle Ion Implantations
- Organic Contamination Dependence of Process-Induced Interface Trap Generation in Ultrathin Oxide Metal Oxide Semiconductor Transistors
- Electrical Characteristics of Si Single-Electron Transistor Based on Multiple Islands
- Atomic Layer Deposition of HfO2 Using Hf[N(C2H5)2]4 and H2O
- Conduction Path Fluctuation in Silicon Two-Dimensional Tunnel Junction Array
- Monte Carlo Simulation of the Two-Dimensional Site Percolation Problem for Designing Sensitive and Quantitatively Analyzable Field-Effect Transistors
- Atomic Layer Deposition of HfO2 and Si Nitride on Ge Substrates
- Modified Direct-Current Current-Voltage Method for Interface Trap Density Extraction in Metal-Oxide-Semiconductor Field-Effect-Transistor with Tunneling Gate Dielectrics at High Temperature
- Annealing Temperature Dependence on Nickel–Germanium Solid-State Reaction
- Application of Highly-Doped Si Single-Electron Transistors to an Exclusive-NOR Operation