The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2005-05-20
著者
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MURAKAMI Masanori
Department of Cardiovascular Surgery, Shakaihoken Tokuyama Central Hospital, Shunan
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Shimada Masahiro
Department of Respiratory Diseases, National Hospital Organization Tokyo National Hospital
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村上 正紀
学校法人立命館
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村上 正紀
The Ritsumeikan Trust
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TSUKIMOTO Susumu
Department of Materials Science and Engineering, Kyoto University
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MORIYAMA Miki
Optoelectronics Division, Toyoda Gosei Co., Ltd.
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MORITA Toshifumi
Department of Materials Science and Engineering, Kyoto University
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守山 実希
京都大学大学院工学研究科材料工学専攻
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Tsukimoto Susumu
Department Of Materials Science And Engineering Kyoto University
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Tsukimoto Susumu
Department Of Quantum Engineering Nagoya University
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Morita Toshifumi
Department Of Materials Science And Engineering Kyoto University
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Morita Toshifumi
Department Of Aerospace Engineering College Of Science And Technology Nihon University
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Murakami Masanori
Department Of Applied Chemistry Tokyo Institute Of Technology
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Morita T
Kyoto Inst. Of Technol. Kyoto Jpn
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Tsukimoto Susumu
World Premier International Research Center Advanced Institute For Materials Research Tohoku Univers
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Shimada Masahiro
Department Of Materials Science And Engineering Kyoto University
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- PREFACE
- Self-Formation of Ti-rich Interfacial Layers in Cu(Ti) Alloy Films
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