Low Resistance TiAl Ohmic Contacts with Multi-Layered Structure for p-Type 4H-SiC

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2002-07-01

著者

• MURAKAMI Masanori

  Department of Cardiovascular Surgery, Shakaihoken Tokuyama Central Hospital, Shunan

• Nakatsuka Osamu

  Venture Business Laboratory Kyoto University

• Koide Yasuo

  Sensor Materials Center National Institute For Materials Science (nims)

• Koide Yasuo

  Department Of Electronics School Of Engineering Nagoya University

• Koide Yasuo

  Department Of Materials Science And Engineering Kyoto University

• Koide Yasuo

  Sensor Materials Center National Institute For Materials Science

• Murakami Masanori

  Department Of Applied Chemistry Tokyo Institute Of Technology

• Koide Y

  Kyoto Univ. Kyoto Jpn

• TAKEI Tomonori

  Department of Materials Science and Engineering, Kyoto University

• Takei Tomonori

  Department Of Materials Science And Engineering Kyoto University

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• Low Resistance TiAl Ohmic Contacts with Multi-Layered Structure for p-Type 4H-SiC
• PREFACE
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• Dependence of Electrical Properties on Work Functions of Metals Contacting to p-type ZnSe
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