Reliability of Thin Gate Oxides Irradiated under X-Ray Lithography Conditions
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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Yeo I
Hyundai Electronics Ind. Co. Ltd. Kyungki‐do Kor
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Yeo In
Hyundai Electronics Industries Company Limited Semiconductor Advanced Research Division
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Kim Sun
Department Of Chemical Engineering Sogang University
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Cho B
National Univ. Singapore Sgp
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Cho Byung
Department Of Electrical And Computer Engineering National University Of Singapore
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Joo Moon
Hyundai Electronics Industries Company Limited Semiconductor Advanced Research Division
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ANG Chew
Department of Electrical and Computer Engineering, National University of Singapore
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LING Chung
Department of Electrical and Computer Engineering, National University of Singapore
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Ling C
Department Of Electrical And Computer Engineering National University Of Singapore
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- Reliability of Thin Gate Oxides Irradiated under X-Ray Lithography Conditions