High-K Dielectrics for Charge Trap-type Flash Memory Application(Session2: Silicon Devices I)
スポンサーリンク
概要
- 論文の詳細を見る
In this paper, lanthanide group oxides, AlLaO_x, HfLaO_x, Gd_2O_3 and GdAlO_3, used as blocking oxide in charge trap-type Flash memory devices have been studied. The ALD process for AlLaO_x and HfLaO_x with high deposition rate, good uniformity and self-limiting behavior were successfully developed. The charge trap memory with AlLaO_x and HfLaO_x as blocking layer demonstrates much faster operation speed but comparable (AlLaO_x) or worse (HfLaO_x) retention, compared to Al_2O_3 blocking layer control sample. Another group of high-k materials, Gd_2O_3-based dielectric, used as the blocking oxide demonstrates enhanced operation speed. Incorporation of Al into Gd_2O_3 improves the retention further, which is an attractive candidate for blocking layer in charge trap-type Flash memory devices.
- 2008-07-02
著者
-
Cho Byung
Department Of Eecs Kaist
-
He Wei
Department Of Ece National University Of Singapore
-
Cho Byung
Department Of Electrical And Computer Engineering National University Of Singapore
-
Pu Jing
Department of ECE, National University of Singapore
-
Pu Jing
Department Of Ece National University Of Singapore
-
He Wei
Department of Cardiothoracic Surgery, Zhongda Hospital, Medical School, Southeast University
関連論文
- Synthesis of wafer scale graphene layer for future electronic devices(Session 2B : Graphene and III-Vs)
- Synthesis of wafer scale graphene layer for future electronic devices(Session 2B : Graphene and III-Vs)
- Cubic-Structured HfLaO for the Blocking Layer of a Charge-Trap Type Flash Memory Device
- The Role of Hyaluronic Acid, Chitosan, and Calcium Sulfate and Their Combined Effect on Early Bony Consolidation in Distraction Osteogenesis of a Canine Model
- Clinical Application of Injectable Calcium Sulfate on Early Bony Consolidation in Distraction Osteogenesis for the Treatment of Craniofacial Microsomia
- Early Revascularization of Membranous Inlay Bone Graft in Canine Mandible Model
- Wideband 3/4 Elliptical Ring Patch for Millimeter-Wave Communication(Antennas and Propagation)
- EXPERIMENTAL STUDY FOR THE TOXICOLOGICAL EFFECTS OF SVATE-3 ON RAT LIVER : OBSERVATION BY LIGHT AND ELECTRON MICROSCOPE AND BY ENZYME HISTOCYTOCHEMISTRY
- Design and in Vitro/in Vivo Evaluation of Multi-layer Film Coated Pellets for Omeprazole
- Biphasic Drug Release : Permeability and Swelling of Pectin/Ethylcellulose Films, and in Vitro and in Vivo Correlation of Film-Coated Pellets in Dogs
- High-K Dielectrics for Charge Trap-type Flash Memory Application(Session2: Silicon Devices I)
- High-K Dielectrics for Charge Trap-type Flash Memory Application(Session2: Silicon Devices I)
- A Brief Review of Epidemiological Studies on Ischemic Heart Disease in Japan
- Reliability of Thin Gate Oxides Irradiated under X-Ray Lithography Conditions
- Gate Oxide Reliability Concern Associated with X-Ray Lithography
- Investigation of Reliability Degradation of Ultra-Thin Gate Oxides Irradiated under Electron-Beam Lithography Conditions
- Intergrity of Gate Oxides Irradiated Under Electron-Beam Lithography Conditions
- Hot-Carrier Lifetime Dependence on Channel Width and Silicon Recess Depth in N-Channel Metal-Oxide-Semiconductor Field-Effect-Transistors with the Recessed Local Oxidation of Silicon Isolation Structure(Semiconductors)
- Dependence of Chemical Composition Ratio on Electrical Properties of HfO_2-Al_2O_3 Gate Dielectric
- An Optimal Time for Software Testing under the User's Requirement of Failure-Free Demonstration before Release
- Four novel ULBP splice variants are ligands for human NKG2D
- Mechanism of Date Retention Improvement by High Temperature Annealing of Al2O3 Blocking Layer in Flash Memory Device
- The recognition of γδ TCR to protein antigen does not depend on the hydrophobic I97 residue of CDR3δ
- Reliability of Thin Gate Oxides Irradiated under X-Ray Lithography Conditions
- Improvement of Charge Retention in Flash Memory Devices by Very Light Doping of Lanthanum into an Aluminum-Oxide Blocking Layer
- Berberine Inhibits Growth and Induces G1 Arrest and Apoptosis in Human Cholangiocarcinoma QBC939 Cells
- Improvement of Charge Retention in Flash Memory Devices by Very Light Doping of Lanthanum into an Aluminum-Oxide Blocking Layer
- Simple and Partial Correlationships of Nutritional Factors to Serum High-Density Lipoprotein Cholesterol Levels in a Japanese Rural Population
- Hypoxic Preconditioning Increases Survival of Cardiac Progenitor Cells via the Pim-1 Kinase-Mediated Anti-Apoptotic Effect