Shiba K | Nec Electronics Corporation

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著作論文

Luminescence Study of Thermally-Oxidized Porous Si under Subgap or Overgap Excitation
Luminescence from Thermally Oxidized Porous Silicon
Sub-Half-Micron Silicon Pattern Generation by Electron Beam Direct Writing on Polysilane Films
A Robust Embedded Ladder-Oxide/Cu Multilevel Interconnect Technology for 0.13μm Complementary Metal Oxide Semiconductor Generation
Multilevel Aluminum Dual-Damascene Interconnects for Process-Step Reduction in 0.18 μm ULSIs
Multilevel Aluminum Dual-Damascene Interconnects (Al-DDI) for Process-Step Reduction in 0.18um-ULSIs
Dual Damascene Interconnect Technology for 130-nm-node Complementary Metal-Oxide-Semiconductor Devices Using Ladder-Oxide Film

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