SEKINE Makoto | ULSI Device Development Division, NEC Corporation
スポンサーリンク
概要
関連著者
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SEKINE Makoto
ULSI Device Development Division, NEC Corporation
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Sekine Makoto
Ulsi Device Development Division Nec Corporation
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HORIOKA Keiji
The Institute of Scientific and Industrial Research, Osaka University
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Okano H
Applied Materials Japan Inc. Chiba Jpn
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Okano Haruo
Ulsi Research Center Toshiba Corp.
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Horioka Keiji
Ulsi Research Laboratories Research And Development Center Toshiba Corporation
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Sekine M
Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac
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Yoshida Y
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology (aist)
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YOSHIDA Yukimasa
Semiconductor Manufacturing Engineering Center, Semiconductor Division, Toshiba Corporation
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Horiuchi Tadahiko
ULSI Device Development Lab., NEC Corporation
著作論文
- Dual Damascene Interconnect Technology for 130-nm-node Complementary Metal-Oxide-Semiconductor Devices Using Ladder-Oxide Film
- A New High-Density Plasma Etching System Using A Dipole-Ring Magnet
- Gate Oxide Breakdown Phenomena in Magnetron Plasma