YOKOYAMA Takashi | ULSI Device Development Laboratories, NEC Corporation
スポンサーリンク
概要
関連著者
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YOKOYAMA Takashi
ULSI Device Development Laboratories, NEC Corporation
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USAMI Tatsuya
ULSI Device Development Laboratories, NEC Corporation
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Usami Tatsuya
Ulsi Device Development Laboratories Nec Corporation
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Yokoyama Takashi
Ulsi Device Development Division Nec Corporation
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上野 啓司
埼玉大理
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Horiuchi Tadahiko
ULSI Device Development Lab., NEC Corporation
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Yamada Y
Department Of Quantum Science And Energy Engineering Tohoku University
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Kishimoto Koji
Ulsi Device Development Laboratories Nec Corporation
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Yoshida Y
Department Of Energy Engineering And Science Nagoya University
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Yamada Y
Akita Univ. Akita Jpn
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Yamada Yuh
National Research Institute For Metals
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Oda Noriaki
Nec Electronics Corp. Kawasaki‐shi Jpn
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Horiuchi Tadahiko
Nec Electronics Corporation
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Horiuchi Tadahiko
Ulsi Device Development Lab. Nec Corporation
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Yokoyama Toshifumi
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Kishimoto K
Nec Corp. Kanagawa Jpn
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YAMADA Yoshiaki
VLSI Manufacturing Engineering Division, NEC Corporation
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KAWAMOTO Hideaki
ULSI Device Development Laboratories, NEC Corporation
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UENO Kazuyoshi
ULSI Device Development Laboratories, NEC Corporation
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GOMI Hideki
ULSI Device Development Laboratories, NEC Corporation
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Yokoyama T
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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USAMI Tatsuya
NEC Electronics Corporation
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WATANABE Susumu
NEC Electronics Corporation
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Gomi H
Nec Corp. Kanagawa Jpn
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Gomi Hideki
Ulsi Device Development Laboratories Nec Corporation
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Nagahara Seiji
Ulsi Device Development Division Nec Corporation
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Kawamoto Hideaki
Ulsi Device Development Laboratories Nec Corporation
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SHIBA Kazutoshi
ULSI Device Development Division, NEC Corporation
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NISHIZAWA Atsushi
ULSI Device Development Division, NEC Corporation
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YAMATO Hidekazu
Production Control Division, NEC Corporation
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WATANABE Susumu
ULSI Device Development Division, NEC Corporation
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NAKABEPPU Kenichi
ULSI Device Development Division, NEC Corporation
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KUNIMUNE Yorinobu
ULSI Device Development Division, NEC Corporation
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SEKINE Makoto
ULSI Device Development Division, NEC Corporation
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ODA Noriaki
ULSI Device Development Division, NEC Corporation
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Shiba K
Nec Electronics Corporation
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Shiba Kazutoshi
Ulsi Device Development Division Nec Corporation
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Oda Noriaki
Ulsi Device Development Division Nec Corporation
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Yokoyama T
Tokai Univ. Kanagawa Jpn
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Nakabeppu Kenichi
Ulsi Device Development Division Nec Corporation
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Nishizawa Atsushi
Ulsi Device Development Division Nec Corporation
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Kunimune Yorinobu
Ulsi Device Development Division Nec Corporation
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Sekine Makoto
Ulsi Device Development Division Nec Corporation
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Yamato Hidekazu
Production Control Division Nec Corporation
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Yokoyama Yoshihiko
Superconductivity Research Laboratory, International Superconductivity Technology Center
著作論文
- A 0.7-μm-Pitch Double Level Al Interconnection Technology for 1-Gbit DRAMs using SiO_2 Mask Al Etching and Plasma Enhanced Chemical Vapor Deposition SiOF
- Dual Damascene Interconnect Technology for 130-nm-node Complementary Metal-Oxide-Semiconductor Devices Using Ladder-Oxide Film