Yamasaki S | Ulsi Device Development Laboratories Nec Corporation
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概要
関連著者
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Yamasaki S
Ulsi Device Development Laboratories Nec Corporation
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林 康明
京都工芸繊維大学大学院
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林康 明
京都工芸繊維大学工芸学部電子情報工学科
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林 康明
京都工芸繊維大学大学院工芸科学研究科
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Hayashi Yutaka
Device Synthesis Section Electrotechnical Laboratory
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Hayashi Yuzo
Irie Koken Co. Ltd.
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Hayashi Y
Irie Koken Co. Ltd. Saitama Jpn
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Takewaki Toshiyuki
Nec Electronics Corporation
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SHIBA Kazutoshi
NEC Electronics Corporation
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KUBO Akira
NEC Electronics Corporation
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Kikuta Kuniko
Ulsi Device Development Laboratories Nec Corporation
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SHIBA Kazutoshi
Silicon Systems Research Laboratories, NEC Corporation
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WAKABAYASHI Hitoshi
Silicon Systems Research Laboratories, NEC Corporation
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TAKEWAKI Toshiyuki
ULSI Device Development Laboratories, NEC Corporation
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KUBO Akira
ULSI Device Development Laboratories, NEC Corporation
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YAMASAKI Shinya
ULSI Device Development Laboratories, NEC Corporation
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HAYASHI Yoshihiro
Silicon Systems Research Laboratories, NEC Corporation
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Yamasaki Shinya
Ulsi Device Development Laboratories Nec Corporation
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Shiba K
Nec Electronics Corporation
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Shiba Kazutoshi
Ulsi Device Development Division Nec Corporation
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Wakabayashi H
Taiyo Yuden Co. Ltd. Gunma Jpn
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Wakabayashi Hitoshi
Silicon Systems Research Laboratories Nec Corporation
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Wada Hideo
Japan Defense Agency
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Wada Hideo
Technical Research And Development Institute Japan Defense Agency
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SUNAOSHI Hitoshi
ULSI Research Labs., R&D Center, Toshiba Corporation
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HATTORI Kiyoshi
ULSI Research Labs., R&D Center, Toshiba Corporation
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Hattori K
Department Of Materials Science And Chemical Engineering Faculty Of Engineering Shizuoka University
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Ogawa Yoji
Ulsi Research Laboratories Research And Development Center Toshiba Corporation
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Ogawa Yoji
Ulsi Research Center Toshiba Corporation
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Hattori K
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Wada H
Japan Defense Agency
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WADA Hirotsugu
ULSI Research Laboratories, Toshiba Corporation
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NISHIMURA Shinsuke
EBM Engineering and Manufacturing Department, Semiconductor Equipment Division, Toshiba Machine Co.,
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YAMASAKI Satoshi
EBM Engineering and Manufacturing Department, Semiconductor Equipment Division, Toshiba Machine Co.,
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TAMAMUSHI Shuichi
EBM Engineering and Manufacturing Department, Semiconductor Equipment Division, Toshiba Machine Co.,
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Shimomura N
Ebm Engineering And Manufacturing Department Semiconductor Equipment Division Toshiba Machine Co. Lt
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Sunaoshi Hitoshi
Ulsi Research Laboratories Research And Development Center Toshiba Corporation
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Tamamushi Shuichi
Ebm Engineering And Manufacturing Department Semiconductor Equipment Division Toshiba Machine Co. Lt
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Wada Hirotsugu
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
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Hattori Kiyoshi
ULSI Research Center, Toshiba Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210
著作論文
- Multilevel Aluminum Dual-Damascene Interconnects for Process-Step Reduction in 0.18 μm ULSIs
- Multilevel Aluminum Dual-Damascene Interconnects (Al-DDI) for Process-Step Reduction in 0.18um-ULSIs
- Evaluation of Shaping Gain Adjustment Accuracy Using Atomic Force Microscope in Variably Shaped Electron-Beam Writing Systems