Reduction of Moisture in Semiconductor Dry Process Equipment by Generating Extremely Low Oxygen Ambience
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概要
- 論文の詳細を見る
The decomposition of moisture has been enhanced by reducing oxygen in process gases, and extremely low moisture gases have been successfully generated. An oxygen reduction system using a solid electrolyte has been used to reduce oxygen and enhance the decomposition of moisture. A marked increase in the evacuation speed of a process chamber has been successfully demonstrated when flushing with an extremely low moisture gas.
- The Japan Society of Applied Physicsの論文
- 2009-08-25
著者
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Yoshida Yoshiyuki
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Endo Kazuhiko
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Shirakawa Naoki
National Institute for Materials Science
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Iwase Takeshi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Mino Tetsuya
Redoxyon Inc., Chiyoda, Tokyo 101-0031, Japan
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Shirakawa Naoki
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Yoshida Yoshiyuki
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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