The Effect of the Growth Temperature on Polyoxide by Rapid Thermal Processing
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概要
- 論文の詳細を見る
A rapid thermal oxynitridation process using N2O gas as the oxidant has been developed. Due to a smoother polyoxide/polysilicon interface, polyoxide grown by rapid thermal processing has better reliability than that of polyoxide grown by a conventional furnace. Moreover, in order to explore the effects of growth temperature on polyoxides, polyoxides were grown at different temperatures in this study. From this work, we find that polyoxide grown at low temperatures has better reliability than polyoxides grown at high temperature and exhibits improved characteristics such as higher breakdown electric field, less gate voltage shift, and larger charger-to-breakdown.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-03-15
著者
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Sun Yong
Department Of Burns & Plastic Surgery Beijing Ji-shui-tan Hospital
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CHANG Kow
Department of Electronic Engineering and Institute of Electronics, National Chiao Tung University, N
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Lee Tzyh
Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University
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Chang Kow
Department of Electronics Engineering and Institute of Electronics of National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of China
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Sun Yong
Department of Applied Science for Integrated System Engineering, Graduate School of Engineering, Kyushu Institute of Technology
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Lee Tzyh
Department of Electronics Engineering and Institute of Electronics of National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of China
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