Comparison of the Characteristics of Polyoxides Grown by Thermal, Rapid Thermal Oxidation, and Tetraethylorthosilicate Deposition Methods
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概要
- 論文の詳細を見る
The characteristics of polyoxides grown by different methods in order to find the best way of growing high qualities of poly-oxide were investigated in this work. Thermal, rapid thermal oxidation (RTO), and tetracthylorthosilicate (TEOS) deposition methods were used to grow the polyoxides. RTO provided a smoother interface of polyoxide/polysilicon than that of thermal furnace method. TEOS deposition method resulted in a smooth polyoxide/poly-1 interface due to no polysilicon consumption. The polyoxide grown by thermal method had the worst characteristics, while the post-deposition RTO method had the best qualities (low leakage current, high breakdown electric field, low voltage shift, and high charge-to-breakdown). The high qualities of polyoxide grown by post-deposition RTO method were due to the smooth polyoxide/poly-1 interface and less electron trapping.
- 社団法人応用物理学会の論文
- 1999-10-15
著者
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Sun Yong
Department Of Burns & Plastic Surgery Beijing Ji-shui-tan Hospital
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CHANG Kow
Department of Electronic Engineering and Institute of Electronics, National Chiao Tung University, N
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Sun Yong
Department Of Electronics Engineering And Institute Of Electronics Of National Chiao-tung University
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Chang K
National Chiao‐tung Univ. Hsin‐chu Twn
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LEE Tzyh
Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University
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Lee Tzyh
Department Of Electronics Engineering And Institute Of Electronics Of National Chiao-tung University
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Lee Tzyh
Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University
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Sun Yong
Department of Applied Science for Integrated System Engineering, Graduate School of Engineering, Kyushu Institute of Technology
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