1P1-B06 MEMS技術によるECFマイクロレートジャイロの特性評価

概要

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We confirmed the characteristics of liquid micro rate gyro partly made by MEMS technology. Although the sensing principle for angular rate is based on that of a conventional gas rate sensor, the liquid micro rate gyro works by an electro-conjugate fluid (ECF) instead of a gas. The electro-conjugate fluid is a dielectric fluid that works as a functional fluid, generating a powerful jet flow (ECF jet) when subjected to a high DC voltage. In our previous study, an ECF micro rate gyro was made by machines and hand working. In this study, we propose a MEMS fabricating process of ECF jet generator and flow channel, which are parts of the ECF micro rate gyro. By using MEMS technology, we can downsize and integrate an ECF micro rate gyro. Then, we fabricated a prototype of the ECF micro rate gyro partly made by MEMS technology and characterized it by experiment.
一般社団法人日本機械学会の論文