1P1-B05 MEMS技術を用いた管路形ECFマイクロポンプ

概要

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In this paper, we propose and present a tube-type electro-conjugate fluid (ECF) micropump whose pumping sources are mounted on the inner side of flow channels and serially located along the flow channels. ECF is a kind of functional and dielectric fluid. When a high DC voltage is applied to a pair of electrodes immersed in the ECF, a strong and active jet flow of ECF (ECF-jet) is generated between these two electrodes. To combine easy fabrication and high performance, we propose a novel ECF-jet generator that consists of a triangular prism and a slit electrode for the tube-type ECF micropump. A MEMS process including photolithography technology with thick photoresist and nickel electroplating is proposed to fabricate the high aspect ratio triangular prism-slit electrodes. Ni-formed electrodes are entirely covered with gold by electroplating, in order to make the electrodes stable. The tube-type ECF micropump composed of MEMS-faricated electrodes was successfully fabricated. The maximum output pressure of 24.6kPa was obtained at 2.0kV of the applied voltage, and the effectiveness of the gold plating in the stability of the ECF micropump was experimentally clarified.
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