T0302-1-3 環境制御型引張試験システムを用いたAl合金薄膜の機械的特性評価(マイクロ・ナノ力学とシステム設計論(1))

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This paper describes the mechanical characterization of sputtered aluminum-alloy (Al-alloy) film used as a structural material in microelectromechanical systems (MEMS). The environment-controlled uniaxial tensile test system with elongation measurement image analysis function was developed to investigate the material characteristics at temperatures ranging from room temperature (RT) to 358 K. From the quasi-static tensile test results, no specimen size effect on Young's modulus and yield stress was found, whereas the annealing and temperature influences were clearly observed. To investigate mechanical degradation to cycling loading, the cyclic loading tests were conducted under constant stress- and strain-amplitude modes. In constant stress-amplitude mode, stain amplitude increased with an increase of loading cycles. Almost of the specimens fractured during the tests. Meanwhile, in constant strain-amplitude mode, stress amplitude gradually decreased with increasing cycles, but no fatigue failure was found. The cyclic loading and stress relaxation tests revealed that creep deformation was dominant in the degradation of Al-alloy film subjected to cyclic motion.
2009-09-12