829 X 線回折援用引張り試験装置の開発による MEMS 材料の機械的性質評価

概要

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This paper presents the development of tensile test technique for evaluation of elastic properties of MEMS materials in order to reliably design MEMS. A compact tensile tester operating in X-ray diffraction system was newly developed to measure Young's modulus, Poisson's ratio and fracture strength of micro-sized single/poly crystalline materials. Changes of X-ray diffraction patterns with increasing a tensile stress directly derived lateral strains of single crystal silicon (Si) specimens. Averaged value of Young's modulus and Poisson's ratio of the specimens was 168 GPa and 0.270,respectively, in agreement with analytical values calculated from anisotropic theory. This technique has, therefore, great potential for evaluating mechanical properties of micro-sized materials.
一般社団法人日本機械学会の論文
2003-08-05