Photocatalytic machining of organic molecular layer on a Si wafer surface by use of a porous TiO_2 micro wire
スポンサーリンク
概要
- 論文の詳細を見る
Photocatalytic machining of the organic molecular layer of octadecyl-trichlorosilane (OTS) coated on a Si wafer was investigated in the atmosphere by use of a porous TiO_2 micro wire which was prepared by phase separation and selective leaching process. The OTS coated on the Si wafer surface was clearly machined within 1 min under UV irradiation. From the examination of the effect of humidity on the OTS machining rate, the ambient air was found to have sufficient condition for this machining procedure. On the contrary, the OTS in UV non-irradiated area was not machined at all. This indicated "double excitation mechanism", which the photo induced oxygen radicals on TiO_2 were further photo excited by the irradiation of UV light, proceeded. This process is capable of on-demand machining of organic molecular layer in normal atmospheric condition.
- 社団法人日本セラミックス協会の論文
- 2008-02-01
著者
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SONE Yoshiaki
Department of Food and Nutrition, Graduate School of Osaka City University
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MATSUMOTO Mutsuyoshi
Department of Materials Science and Technology, Tokyo University of Science
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OHGAKI Takeshi
National Institute for Materials Scinece
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Ohgaki Takeshi
National Institute For Materials Science (nims)
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Matsumoto Mutsuyoshi
Department Of Materials Science And Technology Faculty Of Industrial Science And Technology Tokyo Un
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Sone Yoshiaki
Department Of Food And Nutrition Faculty Of Human Life Science
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Sone Yoshiaki
Department Of Materials Science And Technology Faculty Of Industrial Science And Technology Tokyo Un
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NISHIO Keishi
Department of Materials Science and Teclmology, Science Universtitv of Tokyo
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Nishio Keishi
Department Of Materials Science And Technology Faculty Of Industrial Science And Technology Tokyo Un
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Nishio Keishi
Department Of Material Science And Technology Tokyo University Of Science
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KISHI Tetsuo
Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo
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YASUMORI Atsuo
Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo
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Kishi Tetsuo
Department Of Materials Science And Technology Tokyo University Of Science
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Ohgaki Takeshi
National Inst. For Materials Sci.
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Yasumori Atsuo
Department Of Materials Science And Technology Faculty Of Industrial Science And Technology Tokyo Un
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Kishi Tetsuo
Department Of Materials Science And Technology Faculty Of Industrial Science And Technology Tokyo Un
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Yasumori Atsuo
Department Of Materials Science And Technology Faculty Of Industrial Science And Technology Tokyo Un
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Matsumoto Mutsuyoshi
Department of Materials Science and Engineering, Faculty of Industrial Science and Technology, Tokyo University of Science
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