Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam : Instrumentation, Measurement, and Fabrication Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-09-15

著者

• TOMINAGA Junji

  Laboratory for Advanced Optical Technology (LAOTECH), National Institute of Advanced Industrial Scie

• Shi Lu

  Data Storage Institute Dsi Building 5 Engineering Drive 1

• Shi Lu

  Data Storage Institute

• Tominaga J

  Center For Applied Near-field Optics Research (can-for) Aist

• Tominaga J

  Chikumagawa The 1st Technical Center Tdk

• Tominaga Junji

  Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec

• Atoda Nobufumi

  Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec

• Atoda N

  Sortec Ibaraki Jpn

• Atoda Nobufumi

  Sortec

• Atoda N.

  National Institute for Advanced Interdisciplinary Research (NAIR) Advanced Optical Memory Group

• KUWAHARA Masashi

  Laboratory for Advanced Optical Technology, National Institute of Advanced Industrial Science and Te

• LI Jianming

  Data Storage Institute

• MIHALCEA Christoph

  Laboratory for Advanced Optical Technology, National Institute of Advanced Industrial Science and Te

• Kuwahara M

  Center For Applied Near-field Optics Research (can-for) Aist

• Atoda N

  Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec

• Mihalcea Christoph

  Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec

• Tominaga Junji

  Laboratory For Advanced Optical Technology (laotech) National Institute Of Advanced Industrial Science And Technology (aist)

関連論文

• Observation of Eye Pattern on Super-Resolution Near-Field Structure Disk with Write-Strategy Technique
• Super-Resolution Read-Only Memory Disk with Metal Nanoparticles or Small Aperture
• Super-Resolution Near-Field Structure and Signal Enhancement by Surface Plasmons
• In-situ Raman Scattering Spectroscopy for a Super Resolution Optical Disk during Readout
• Electroplated Reflection Masks for Soft X-Ray Projection Lithography
• Resist Performance in 5 nm Soft X-Ray Projection Lithography
• Reduction Imaging at 4.5 nm with Schwarzschild Optics
• Fabrication of 0.1μm Line-and-Space Patterns using Soft X-Ray Reduction Lithography
• Sub-0.1 μm Resist Patterning in Soft X-Ray (13 nm) Projection Lithography
• Super-Resolution Near-Field Structure with Alternative Recording and Mask Materials
• Optical Properties of Metal-Oxide Films in Super-RENS
• Super-Resolutional Readout Disk with Metal-Free Phthalocyanine Recording Layer
• Spectroscopic Investigation of AgO_x Films for Super Resolution Near Field Structure Application
• Antimony Aperture Properties on Super-Resolution Near-Field Structure using Different Protection Layers
• The Near-Field Super-Resolution Properties of an Antimony Thin Film
• Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam : Instrumentation, Measurement, and Fabrication Technology
• Local Structure of AgO_x Thin Layers Generating Optical Near Field : an X-Ray Absorption Fine Structure Study
• Optical Transition of Chalcogenide Phase-Change Thin Films
• Readout Durability Improvement of Super-Resolution Near-Field Structure Discs with PtO_x-SiO_2 Recording and GeN_y Interfacial Layers
• Analysis of Deformation of X-Ray Mask Membrane in Aligner Motion
• A New Structure of Super-Resolution Near-Field Phase-Change Optical Disk with a Sb_2Te_3 Mask Layer
• Study of the Superlattice-Like Phase Change Optical Recording Disks
• Study of the Multi-Level Reflection Modulation Recording for Phase Change Optical Disks
• Thermal Modeling of Grooved Phase Change Optical Recording Disk
• Effect of Helium Gas Pressure on X-Ray Mask Heating during Synchrotron Radiation Exposure
• In-Ag-Te-Sb Phase Change Recording Media at Compact Disk Linear Velocity
• V and Ti Doping Effect on In-Ag-Te-Sb Optical Phase Change Rewritable Disc
• New Recordable Compact Disc with Inorganic Material, AgO_x
• Thermal Origin of Readout Mechanism of Light-Scattering Super-Resolution Near-Field Structure Disk
• High-Speed Optical Near-Field Photolithography by Super Resolution Near-Field Structure
• Fundamental Study in Extracorporeal Shock Wave Lithotripsy Using Piezoceramics : High Power Ultrasonics
• Improvement of Super-RENS MO Disk Characteristics by Optimized Super-Resolution Near-Field Structure
• Super-Resolution Readout Using a Silver Scattering Center with Plasmon Excitation Generated in a Non-Magnetic Readout Layer
• Magneto-Optical Characteristics Enhanced by Super Resolution Near Field Structure
• The Effects of Metal-Doped GeSbTe Films on Light Scattering-Mode Super-Resolution Near-Field Structure (Super-RENS)
• Near-Field Optical Simulation of Super-Resolution Near-Field Structure Disks
• Oxygen Doping Effects on Super-resolution Scattering-mode Near-field Optical Data Storage
• A Near-Field Recording and Readout Technology Using a Metallic Probe in an Optical Disk
• The Characteristics and the Potential of Super Resolution Near-Field Structure
• Double Optical Phase Transition of GeSbTe Thin Films Sandwiched between Two SiN Layers
• Effect of SiO2 addition to PtOx recording layer of super-resolution near-field structure disc (Special issue: Optical memories)
• Metal-Free Phthalocyanine Layer Prepared on Read-Only-Memory Disc for Super-Resolution Readout
• Super-RENS Disk for Blue Laser System Retrieving Signals from Polycarbonate Substrate Side
• Readout Power Dependence of Signal Distribution Observed in Fourier Plane of Focus Spot
• An Approach to Lower the Threshold Laser Power of Super-Resolutional-Readout Optical Disk Using Silver Telluride Layer
• Scanning Tunneling Microscopy Image of GeSb_2Te_4 Thin Films
• Investigation on Super-Resolution Near-Field Blu-Ray-Type Phase-Change Optical Disk with Sb_2Te_3 Mask Layer
• Super-Resolution Near-Field Phase Change Disk with Sb_Te_ Mask Layer
• Dynamics of Ultrafast Crystallization in As-Deposited Ge_2Sb_2Te_5 Films
• Bit-by-Bit Detection on Super-Resolution Near-Field Structure Disk with Platinum Oxide Layer
• Recording and Readout Mechanisms of Super-Resolution Near-Field Structure Disc with Silver-Oxide Layer
• Electrical Properties of Nanometer-Width Refractory Metal Lines Fabricated by Focused Ion Beam and Oxide Resists
• 50-nm Metal Line Fabrication by Focused Ion Beam and Oxide Resists : Focused Ion Beam Process
• 50-nm Metal Line Fabrication by Focused Ion Beam and Oxide Resists
• Focused Ion Beam Fabrication of Fine Metal Structures by Oxide Resists : Beam-Induced Physics and Chemistry
• Focused Ion Beam Fabrication of Fine Metal Structures by Oxide Resists
• Nanoscale Dots Fabrication by Volume Change Thermal Lithography
• Fabrication and Characterization of Ion-Exchanged Optical Waveguides in Potassium Lithium Niobate Crystal Substrates(Optics and Quantum Electronics)
• Signal Characteristics of Super-Resolution Near-Field Structure Disks with 100GB Capacity
• Super Resolution Read Only Memory Disc Using Super-Resolution Near-Field Structure Technology
• Signal Characteristics of Super-Resolution Near-Field Structure Disk in Blue Laser System
• Thermal Analysis of Multi Track Phase Change Optical Recording Using a Special Parallel Recording Array Head
• Mechanism of Resist Pattern Collapse during Development Process
• Dual Function of Thin MoO_3 and WO_3 Films as Negative and Positive Resists for Focused Ion Beam Lithography
• Elevated-Confined Phase-Change Random Access Memory Cells
• Plastic Deformation and Failure Analysis of Phase Change Random Access Memory
• Magnetic Field Induced by Various Input Beam Polarizations in All-Optical Magnetic Recording
• Blu-ray Type Super-Resolution Near-Field Phase Change Disk with In2Ge8Sb85Te5 Mask Layer
• Focused Ion Beam Lithography with Transition Metal Oxide Resists : Lithography Technology
• Super-Resolution Near-Field Disk with Phase-Change Sn-Doped GeSbTe Mask Layer
• Bit-by-Bit Detection on Super-Resolution Near-Field Structure Disk with Platinum Oxide Layer
• Error Correction Code Failure Rate Analysis for Parity-Check-Coded Optical Recording Systems
• Investigation on Super-Resolution Near-Field Blu-Ray-Type Phase-Change Optical Disk with Sb2Te3 Mask Layer
• Super-Resolution Near-Field Phase Change Disk with Sb70Te30 Mask Layer
• Dynamics of Ultrafast Crystallization in As-Deposited Ge2Sb2Te5 Films
• Local Structure of AgOx Thin Layers Generating Optical Near Field: an X-Ray Absorption Fine Structure Study
• Recording and Readout Mechanisms of Super-Resolution Near-Field Structure Disc with Silver-Oxide Layer
• Thermal Modeling of Grooved Phase Change Optical Recording Disk
• Optical Transition of Chalcogenide Phase-Change Thin Films
• Super-Resolution Near-Field Structure with Alternative Recording and Mask Materials
• Local Structure of AgOx Thin Layers Generating Optical Near Field: an X-Ray Absorption Fine Structure Study

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