Characterization of Switching Properties of Lead-Zirconate-Titanate Thin Films in Ti-Rich Phase
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概要
- 論文の詳細を見る
Switching behaviors of lead-zirconate-titanate thin-film capacitors with Ti/Zr ratios of 60/40 and 75/25 were successfully characterized by observing their switching transient currents. The capacitor with 60/40 showed the remanent polarization density of 24.0μ/cm^2 independent of the frequency of the external switching biases. On the other hand, the remanent polarization density of the capacitor with 75/25 was reduced markedly with increasing the frequency. The remanent polarization density was lowered from 23.6μC/cm^2 at 100Hz to 13.0μC/cm^2 at 12.5 kHz. While the switching transient currents were observedas a function of time, the lead-zirconate-titanate thin-film capacitor with 60/40 showed the typical sharp switching transient current. In sharp contrast, the capacitor with 75/25 ratio showed a monotonous transient current which suggests the presence of ferroelectric domains having long time constants. Consequently, the lead-zirconate-titanate thin film with the Ti/Zr ratio of 60/40 showed better switching behavior as compared to that with the Ti/Zr ratio of 75/25.
- 社団法人応用物理学会の論文
- 1998-05-01
著者
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Sakoda Tatsuya
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Aoki K
Texas Instruments Japan Ltd. Ibaraki Jpn
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Fukuda Yukio
Texas Instruments Tukuba Research & Development Center Limited
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Fukuda Y
Ntt Optoelectronics Laboratories
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Fukuda Yukio
Tsukuba Research And Development Center Texas Instruments Japan Limited
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AOKI Katsuhiro
Texas Instruments Tsukuba Research and Development Center, Limited
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SAKODA Tomoyuki
Texas Instruments Tsukuba R & D Center
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Aoki K
Toshiba Corp. Yokohama Jpn
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Aoki Katsuhiro
Texas Instruments Tsukuba Research & Development Center Limited
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Sakoda T
National College Of Technology
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Fukuda Yuji
Kansai Photon Science Institute Japan Atomic Energy Agency
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Sakoda Tadanori
Department Of Electronics And Control Engineering Kitakyushu National College Of Technology
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Sakoda Tomoyuki
Si Technology Development Texas Instruments Inc.
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Fukuda Yukio
Texas Instruments Tsukuba Research & Development Center Limited
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Fukuda Yuji
JAEA
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Sakoda Tomoyuki
National College of Technology
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