Behavior of Defects in Heavily Boron Doped Czochralski Silicon
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-03-01
著者
-
Sano M
Sumitomo Metal Ind. Ltd. Saga Jpn
-
Horie H
Fujitsu Lab. Ltd. Atsugi Jpn
-
NAKAI Kiyomichi
Department of Materials Science and Engineering, Ehime University
-
Ochiai T
Research And Development Center Sumitomo Sitix Corporation
-
TSUYA Hideki
Silicon Technology R&D Center, Sumitomo Sitix Corporation
-
SANO Masakazu
Silicon Technology R&D Center, Sumitomo Sitix Corporation
-
ONO Toshiaki
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
ASAYAMA Eiichi
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
HORIE Hiroshi
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
HOURAI Masataka
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
Sano Masakazu
Silicon Technology R&d Center Sumitomo Sitix Corporation
-
Nakai K
Nippon Steel Corp. Yamaguchi Jpn
-
Nakai Kiyomichi
Department Of Materials Science & Engineering Ehime University
-
Hourai Masataka
Silicon Technology Center Sumitomo Sitix Corporation
-
ASAYAMA Eiichi
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
SANO Masakazu
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
HOURAI Masataka
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
HORIE Hiroshi
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
ONO Toshiaki
Silicon Technology R & D Center, Sumitomo Sitix Corporation
-
TSUYA Hideki
Silicon Technology R & D Center, Sumitomo Sitix Corporation
関連論文
- Phase Decomposition in a Ti-13Nb-13Zr Alloy during Aging at 600℃
- Effects of Excess Mg and Si on the Isothermal Ageing Behaviours in the Al-Mg_2Si Alloys
- Effects of Metastable Phase Formation on the Magnetic Properties of Pr_Fe_B_ Amorphous Ribbons
- Effects of Boron Addition on Tempering Processes in an Fe-9Cr-0.1C Alloy Martensite
- Ageing Processes in Al-Mg-Si Alloys during Continuous Heating
- Morphology and Crystallography of β-Mg_2Si Precipitation in Al-Mg-Si Alloys
- Analysis of Phase Transformation in a Ti-10 mass % Zr Alloy by Hot Stage Optical Microscopy
- Crystallisation and Phase Decomposition Processes in Pr_Fe_B_ Amorphous Ribbon
- High Temperature Deformation of a Fine-Grained and Particle-Dispersed V-2.3%Y-4%Ti-3%Mo Alloy
- Effect of Fast Neutron Irradiation on the Microstructure in Particle Dispersed Ultra-fine Grained V-Y Alloys
- Bainite Transformation in a Silicon Steel
- Crystallographic Analysis of Upper Bainite in Fe-9% Ni-C Alloys
- Isothermal Decomposition Processes of Austenite in Fe-Cr-C Alloy Steels
- Effects of Small Amounts of B, Nb and Ti Additions on Nucleation and Growth Processes of Intermediate Transformation Products in Low Carbon 3%Mn Steels
- Acoustic and Ferro- and Antiferroelectric Properties near Phase Transition Temperatures of Modified PbZr_xTi_O_3-based Ceramics
- Atomic force Microscope Observation of the Change in Shape and Subsequent Disappearance of "Crystal-Originated Particles" after Hydrogen-Atmosphere Thermal Annealing
- A New Method for Transmission Electron Microscope Observation of Grown-in Defects in As-Grown Czochralski Silicon (111) Crystals
- Influence of Crystal-Originated "Particle" Microstructure on Silicon Wafers on Gate Oxide Integrity
- Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
- Behavior of Defects in Heavily Boron Doped Czochralski Silicon
- Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers
- Elastic Properties of Rhombohedral PLZT Ceramics : A: APPLICATIONS AND FUNDAMENTALS
- Electrical and Optical Properties of Hot-Pressed Ba(La_Nb_) O_3-PbZrO_3-PbTiO_3 Ceramics : F: Ferroelectric Materials
- Electrical and Optical Properties of Hot-Pressed A_αNb_O_3-PbZrO_3-PbTiO_3 (A = Ba,Sr) Ceramics : OPTOELECTRONICS
- Electrical and Optical Properties of Hot-Pressed A(Zn_Nb)O_3-PbTiO_3-PbZrO_3 (A=Ba,Sr,Ca) Ceramics : OPTOELECTRONICS
- Electrical and Optical Properties of Hot-Pressed A(A'_Nb_)O_3-PbZrO_3 -PbTiO_3 (A=Ba,Sr,A'=Pb,Ca,Sr) Ceramics : OPTOELECTRONICS
- Advanced SOI Devices Using CMP and Wafer Bonding
- Effect of hydrogen irradiation during growth on molecular beam epitaxy of ZnO
- Effects of ZnO/MgO Double Buffer Layers on Structural Quality and Electron Mobility of ZnO Epitaxial Films Grown on c-Plane Sapphire
- Precipitation and dissolution reactions in a 6061 Aluminum Alloy
- Microstructures at/around Interface between Plasma Spray Coated Hydroxyapatite and Ti Alloy
- Decomposition Processes of β Phase in a Ti-15Zr-4Nb-4Ta Alloy
- Deformation Behaviors around/at the Interface between Zn-electrodeposition and Fe-substrate
- Cascade Damages and Their Kinetic Behavior in Ceramics Irradiated with Fission- and Fusion-Neutrons
- Properties of Large-Sized Nb-Based Superconducting Tunnel Junctions for X-Ray Detection
- Model Study of Spontaneous Discharge Fluctuations of a Membrane Potential
- Electrical and Optical Properties of ZnS:Sb, Te Grown from Sb_Te_ Solution
- Photoluminescence in ZnSe:Te Prepared by Solution Growth
- Photoluminescence in Sb-Doped ZnS
- High-Speed and Low-Power n^+-p^+ Double-Gate SOI CMOS
- Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics
- Dependence of Grown-in Defect Behavior on Oxygen Concentration in Czoehralski Silicon Crystals
- Formation of Grown-in Defects during Czochralski Silicon Crystal Growth
- Relationship between Grown-in Defects in Czochralski Silicon Crystals
- Photoluminescence of ZnS_Se_x:Te Prepared by Solution Growth Using Sb-Chalcogenides as Solvent
- Growth of ZnS_xSe_ Crystals from ZnSe-Sb_2S_3-Sb_2Se_3 Solutions
- Influence of Metal Impurities on Leakage Current of Si N^+ P Diode
- Dependence of Gettering Efficiency on Metal Impurities
- TEM Observation of Defects Induced by Ni Contamination on a Si(100) Surface
- Comparison of Gettering Techniques by Means of Intentional Quantitative Cu Contamination : Electrical Properties of Condensed Matter
- Effect of Heat Treatment on Cohesion of Films on Alkali-Treated Titanium
- Grain Size Dependeruce of Optical Transmittances and Linear Electrooptic Coefficients of Hot-Pressed Ba(La_Nb_)O_3-PbZrO_3-PbTiO_3 Ferroelectric Ceramics
- Quadratic Electrooptic Properties of the Ferroelectric Ceramics of the Ternary System Sr(La_Nb_)O_3-PbZrO_3-PbTiO_3 : Ferroelectrics
- Search for a Material with Temperature-Independent Piezoelectric Constant d_ in Nb-Modified Pb(Zr, Ti)O_3 Ceramics : Piezoelectrics
- Electrooptical Properties of the Ferroelectric Ceramics of the Solid Solution Sr(La_Nb_)O_3-PbZrO_3-PbTiO_3 : O: OPTOELECTRONICS
- Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
- Gettering Characteristics of Heavy Metal Impurities in Silicon Wafers with Polysilicon Back Seal and Internal Gettering
- Morphology of Electrodeposited Zn/Fe Crystals
- Zn/Ni Electrodeposition on Low Carbon Steel Substrate
- Formation Process of Lamellar γ Phase in a Ti-40at. %Al Alloy
- Crystallography of Intermetallic Interface Layers in Hot-dip Galvanizing Steel Sheets
- Effects of Lattice Defect Behaviors on Pre-precipitation Stages of γ' and γγ" Phases in a Ni-base Superalloy
- Mechanism of Widmanstatten Austenite Formation in a δ/γ Duplex Phase Stainless Steel
- Decomposition Processes of δ-Ferrite during Continuous Heating in a 25Cr-7Ni-0.14N Stainless Steel
- Effects of Cold Rolling on the Aging Kinetics in an Al-Mg-Si Based Commercial Alloy
- Decomposition Processes of α Phase in a Ti-48 at% Al Alloy
- Effect of Nb Addition on Cu Precipitation in Ferritic Stainless Steel
- Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals
- Investigation of Grown-in Defect Formatiom in Czochralski Silicon Crystals by Optical Precipitate Profiler
- A study of electron-irradiation-induced amorphization and swelling of graphite through electron microscopy.