Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-02-15
著者
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Miyazaki Shuji
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
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Kitamura Takuya
Department Of Physical Electronics Tokyo Institute Of Technology
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MIYAZAKI Morimasa
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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MIYAZAKI Sumio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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KITAMURA Takafumi
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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SHIGEMATSU Tatsuhiko
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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HOURAI Masataka
Silicon Technology R & D Center, Sumitomo Sitix Corporation
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Aoki Toshihiko
Silicon Technology Center Sumitomo Sitix Corporation
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Kitamura T
Murata Mfg. Co. Ltd. Kyoto Jpn
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Nakashima Yutaka
Silicon Technology Center, Sumitomo Sitix Corporation
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Hourai Masataka
Silicon Technology Center Sumitomo Sitix Corporation
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Shigematsu T
Silicon Technology R&d Center Sumitomo Sitix Corporation
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Nakashima Yutaka
Silicon Technology Center Sumitomo Sitix Corporation
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Miyazaki M
Silicon Technology R&d Center Sumitomo Sitix Corporation
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SHIGEMATSU Tatsuhiko
Silicon Technology Center, Sumitomo Sitix Corp.
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Kitamura Takafumi
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Miyazaki Morimasa
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Miyazaki Sumio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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