Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-12-15
著者
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Ono Toshiaki
Research And Development Center Sumitomo Sitix Corporation
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Miyazaki Shuji
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
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Ochiai T
Research And Development Center Sumitomo Sitix Corporation
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MIYAZAKI Morimasa
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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MIYAZAKI Sumio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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YANASE Yoshio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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OCHIAI Takashi
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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SHIGEMATSU Tatsuhiko
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Yanase Yoshio
Research And Development Center Sitix Division Sumitomo Metal Industries Ltd.
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Shigematsu T
Silicon Technology R&d Center Sumitomo Sitix Corporation
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Miyazaki M
Silicon Technology R&d Center Sumitomo Sitix Corporation
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SHIGEMATSU Tatsuhiko
Silicon Technology Center, Sumitomo Sitix Corp.
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Miyazaki Morimasa
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Miyazaki Sumio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
関連論文
- Acoustic and Ferro- and Antiferroelectric Properties near Phase Transition Temperatures of Modified PbZr_xTi_O_3-based Ceramics
- Atomic force Microscope Observation of the Change in Shape and Subsequent Disappearance of "Crystal-Originated Particles" after Hydrogen-Atmosphere Thermal Annealing
- A New Method for Transmission Electron Microscope Observation of Grown-in Defects in As-Grown Czochralski Silicon (111) Crystals
- Influence of Crystal-Originated "Particle" Microstructure on Silicon Wafers on Gate Oxide Integrity
- Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
- Behavior of Defects in Heavily Boron Doped Czochralski Silicon
- Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers
- Elastic Properties of Rhombohedral PLZT Ceramics : A: APPLICATIONS AND FUNDAMENTALS
- Electrical and Optical Properties of Hot-Pressed Ba(La_Nb_) O_3-PbZrO_3-PbTiO_3 Ceramics : F: Ferroelectric Materials
- Electrical and Optical Properties of Hot-Pressed A_αNb_O_3-PbZrO_3-PbTiO_3 (A = Ba,Sr) Ceramics : OPTOELECTRONICS
- Electrical and Optical Properties of Hot-Pressed A(Zn_Nb)O_3-PbTiO_3-PbZrO_3 (A=Ba,Sr,Ca) Ceramics : OPTOELECTRONICS
- Electrical and Optical Properties of Hot-Pressed A(A'_Nb_)O_3-PbZrO_3 -PbTiO_3 (A=Ba,Sr,A'=Pb,Ca,Sr) Ceramics : OPTOELECTRONICS
- Observation of HCl- and HF-Treated GaAs Surfaces by Measuring Contact Angles of Water Droplets
- Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics
- Dependence of Grown-in Defect Behavior on Oxygen Concentration in Czoehralski Silicon Crystals
- Formation of Grown-in Defects during Czochralski Silicon Crystal Growth
- Influence of Metal Impurities on Leakage Current of Si N^+ P Diode
- Comparison of Gettering Techniques by Means of Intentional Quantitative Cu Contamination : Electrical Properties of Condensed Matter
- Generation of Oxidation-Induced Stacking Faults in Czochralski-Grown Silicon Crystals Exhibiting a Ring-like Distributed Stacking Fault Region
- Grain Size Dependeruce of Optical Transmittances and Linear Electrooptic Coefficients of Hot-Pressed Ba(La_Nb_)O_3-PbZrO_3-PbTiO_3 Ferroelectric Ceramics
- Quadratic Electrooptic Properties of the Ferroelectric Ceramics of the Ternary System Sr(La_Nb_)O_3-PbZrO_3-PbTiO_3 : Ferroelectrics
- Search for a Material with Temperature-Independent Piezoelectric Constant d_ in Nb-Modified Pb(Zr, Ti)O_3 Ceramics : Piezoelectrics
- Electrooptical Properties of the Ferroelectric Ceramics of the Solid Solution Sr(La_Nb_)O_3-PbZrO_3-PbTiO_3 : O: OPTOELECTRONICS
- Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
- Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals
- A Model for the Formation of Oxidation-Induced Stacking Faults in Czochralski Silicon