SHIGEMATSU Tatsuhiko | Silicon Technology Center, Sumitomo Sitix Corp.
スポンサーリンク
概要
関連著者
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SHIGEMATSU Tatsuhiko
Silicon Technology Center, Sumitomo Sitix Corp.
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SHIGEMATSU Tatsuhiko
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Shigematsu T
Silicon Technology R&d Center Sumitomo Sitix Corporation
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SADAMITSU Shinsuke
Silicon Technology Center, Sumitomo Sitix Corp.
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Miyazaki Shuji
Department Of Electrical And Information Engineering Faculty Of Engineering Yamagata University
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MIYAZAKI Morimasa
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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MIYAZAKI Sumio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Hourai Masataka
Silicon Technology Center Sumitomo Sitix Corporation
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Miyazaki M
Silicon Technology R&d Center Sumitomo Sitix Corporation
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Sadamitsu Shinsuke
Silicon Technology R&d Center Sumitomo Sitix Corporation
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Miyazaki Morimasa
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Miyazaki Sumio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Ono Toshiaki
Research And Development Center Sumitomo Sitix Corporation
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Ochiai T
Research And Development Center Sumitomo Sitix Corporation
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OCHIAI Takashi
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Sumita Shigeo
Silicon Technology Center Sumitomo Sitix Corporation
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MARSDEN Kieran
Silicon Technology Research & Development Center, Sumitomo Sitix Corporation
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SADAMITSU Shinsuke
Silicon Technology Research & Development Center, Sumitomo Sitix Corporation
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UMENO Shigeru
Silicon Technology Center, Sumitomo Sitix Corp.
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Kitamura Takuya
Department Of Physical Electronics Tokyo Institute Of Technology
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Koike Yasuo
Silicon Technology Center Sumitomo Sitix Corporation
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KITAMURA Takafumi
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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YANASE Yoshio
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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OGUSHI Satoshi
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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SANO Masakazu
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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HOURAI Masataka
Silicon Technology R & D Center, Sumitomo Sitix Corporation
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Sano Masakazu
Silicon Technology R&d Center Sumitomo Sitix Corporation
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Yanase Yoshio
Research And Development Center Sitix Division Sumitomo Metal Industries Ltd.
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Ogushi Satoshi
Silicon Technology R&d Center Sumitomo Sitix Corporation
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Aoki Toshihiko
Silicon Technology Center Sumitomo Sitix Corporation
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Kitamura T
Murata Mfg. Co. Ltd. Kyoto Jpn
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Yamamoto Toshiro
Advanced Technology Research Laboratories Sumitomo Metal Industries Ltd.
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Yamamoto Toshiro
Advanced Technology Laboratories Sumitomo Metal Industries Limited
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Nakashima Yutaka
Silicon Technology Center, Sumitomo Sitix Corporation
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UMENO Shigeru
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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Sadamitsu S
Sumitomo Sitix Corp. Saga Jpn
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Hourai M
Research And Development Center Sitix Division Sumitomo Metal Industries Ltd.
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SUEOKA Koji
Advanced Technology Research Laboratories, Sumitomo Metal Industries Limited
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Umeno S
Sumitomo Metal Ind. Ltd. Saga Jpn
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Shigematsu Tatsuhiko
Silicon Technology Research & Development Center Sumitomo Sitix Corporation
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Marsden K
Sumitomo Sitix Silicon Inc. California Usa
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Nakashima Yutaka
Silicon Technology Center Sumitomo Sitix Corporation
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Sadamitsu Shinsuke
Silicon Technology Research & Development Center Sumitomo Sitix Corporation
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SANO Masakazu
Silicon Technology R & D Center, Sumitomo Sitix Corporation
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SUEOKA Koji
Advanced Technology Research Laboratories, Sumitomo Metal Industries Limited.
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MURAKAMI Hiroki
Silicon Technology Center, Sumitomo Sitix Corp.
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Kitamura Takafumi
Silicon Technology R&D Center, Sumitomo Sitix Corporation
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OKUI Masahiko
Advanced Technology Research Laboratories, Sumitomo Metal Industries Limited.
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HOURAI Masataka
Silicon Technology Center, Sumitomo Sitix Corp.
著作論文
- Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
- Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers
- Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics
- Generation of Oxidation-Induced Stacking Faults in Czochralski-Grown Silicon Crystals Exhibiting a Ring-like Distributed Stacking Fault Region
- Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
- Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals
- A Model for the Formation of Oxidation-Induced Stacking Faults in Czochralski Silicon