Dependence of Gettering Efficiency on Metal Impurities
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概要
- 論文の詳細を見る
The dependence of gettering efficiency on metal impurities was investigated by means of an intentional contaminating method using Ni or Fe and the MOS C-t method with an eye to using gettering techniques appropriately. The results showed that Ni is easily gettered but Fe is not. Therefore, as a second step, the condition improving gettering efficiency for Fe was investigated. It was consequently found that adding heat treatment at low temperature to the final heat cycle is effective for gettering of Fe.
- 社団法人応用物理学会の論文
- 1989-04-20
著者
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Sano M
Sumitomo Metal Ind. Ltd. Saga Jpn
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SADAMITSU Shinsuke
Kyushu Electronic Metal Co., Ltd
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SUMITA Shigeo
Kyushu Electronic Metal Co., Ltd
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FUJINO Nobukatsu
Kyushu Electronic Metal Co., Ltd
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SHIRAIWA Toshio
Osaka Titanium Co., Ltd
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Sumita Shigeo
Kyushu Electronic Metal Co. Ltd
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Miyazaki Morimasa
Kyushu Electronic Metal Co., Ltd
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Sano Masakazu
Kyushu Electronic Metal Co., Ltd
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Shiraiwa Toshio
Osaka Titanium Co. Ltd
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Sadamitsu Shinsuke
Kyushu Electronic Metal Co. Ltd
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