Gettering Characteristics of Heavy Metal Impurities in Silicon Wafers with Polysilicon Back Seal and Internal Gettering

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Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
Behavior of Defects in Heavily Boron Doped Czochralski Silicon
Relationship between Grown-in Defects in Czochralski Silicon Crystals
Generation of Oxidation-Induced Stacking Faults in Czochralski-Grown Silicon Crystals Exhibiting a Ring-like Distributed Stacking Fault Region
Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
Gettering Characteristics of Heavy Metal Impurities in Silicon Wafers with Polysilicon Back Seal and Internal Gettering
Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals
A Model for the Formation of Oxidation-Induced Stacking Faults in Czochralski Silicon

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