Energy Distribution of Au^- Ions Produced by Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-08-01
著者
-
SASAO Mamiko
National Insitute for Fusion Science
-
YAMAOKA Hitoshi
The Institute of Physical and Chemical Research
-
Wada Motoi
Department Of Electronics Doshisha University
-
Wada Motoi
Department Of Elctronics Doshisha University
-
Fujita J
Crest-jst
-
Wada M
Department Of Electronics Doshisha University
-
Sasao M
National Institute For Fusion Science
-
Sasao Mamiko
National Institute For Fusion Science
-
YAMAOKA Hitoshi
RIKEN (The Institute of Physical and Chemical Research)
-
FUJITA Junji
National Institute for Fusion Science
-
OKABE Yushirou
National Institute for Fusion Science
-
Yamaoka H
Inst. Physical And Chemical Res. (riken) Hyogo Jpn
-
Wada Morio
Optical Measurement Technology Development Co. Ltd.
-
Wada M
Miyanodai Technology Development Center Fuji Photo Film Co. Ltd.
関連論文
- Achievement of 10 keV Central Electron Temperatures by ECH in LHD
- Storage and Lifetime Measurements of Multiply Charged Ions Produced by Synchrotron Radiation
- Electron Capture Cross Sections in High Energy He^+Li^0Collisions
- Neutron and Fast Atom Spectrometry Using Natural Diamond Detectors
- Estimation of Electron Temperatures from I-V Characteristics of a Plasma Electrode of a Negative Ion Source
- Production of Diatomic and Triatomic Molecular Negative Ions of Gold and Copper by Sputtering
- Measurement of H^- Density in a Magnetized Plasma
- Nanometer-Scale Patterning of Polystyrene Resists in Low-Voltage Electron Beam Lithography
- Calixarene Electron Beam Resist for Nano-Lithography
- Resolution-Limit Study of Chain-Structure Negative Resist by Electron Beam Lithography
- Fabrication of Nanomanipulator with SiO_2/DLC Heterostructure by Focused-Ion-Beam Chemical Vapor Deposition
- Direct Extraction of Sodium Negative Ions from Sodium Plasma
- Energy Distribution of Au^- Ions Produced by Sputtering
- Dependence of Au^- Production upon the Target Work Function in a Plasma-Sputter-Type Negative Ion Source
- Effect of a Converter Electrode in a Multicusp Negative Ion Source
- Development of the Work Function Monitoring Method for a Converter of a Negative Ion Source
- Sub-10-nm Electron Beam Lithography Using a Poly(α-methylstyrene) Resist with a Molecular Weight of 650
- Observation of Energy Gap in FeGa_3(Condensed matter: electronic structure and electric, magnetic, and optical properties)
- Thermal Characteristics of a Metal-Film Bolometer
- Radiation Loss and Impurity Abundance during ICRF Heating in the JIPP T-IIU Tokamak
- Characteristics of the Detectors for Bolometric Measurement in Application to High Temperature Plasma
- Fourier Transform Spectroscopy of Electron Cyclotron Emission from JIPP T-II Torus
- Observation of Mode-Converted Ion Bernstein Wave by an HCN Laser Scattering
- Application of a Schottky Barrier Diode Mixer to a 118.8 μm Laser lnterferometer
- Observation of Mode-Converted Ion Bernstein Wave by an HCN Laser Scattering
- Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars
- Calibration Source for Electron Cyclotron Emission Measurements
- High-Speed GaInAs PIN Photodiodes with Low Series Resistance
- Evaluation of Surface Zn Concentration in Zn Diffusion into InP
- Effects of Phosphorus Pressure on Low-Energy Emission Bands in Zn-Diffused InP
- Wide-Wavelength GaInAs PIN Photodiodes Using a Lattice-Mismatched Light-Absorbing Layer and a Thin InP Cap Layer
- Incorporation of Arsenic and Gallium in InP Layers in GaInAs/InP Heterostructures Grown by MOVPE
- GaInAs/InP PIN Photodiodes Fabricated by MOVPE and a New Zn Diffusion Technique
- Zn Diffusion into InP Using Dimethylzinc as a Zn Source
- Structure and Resonant Characteristics of Amorphous Carbon Pillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition
- An Investigation as to the Cause of Beam Asymmetry in a Compact Gas Discharge Ion Source : A Focus on Beam-Wall Interaction
- Surface Modification of Narra Wood (Pterocarpus indicus) by Ion Shower Treatment
- Self-Developing Properties of an Inorganic Electron Beam Resist and Nanometer-Scale Patterning Using a Scanning Electron Beam
- Electron-Stimulated Desorption and in situ Scanning Electron Microscopy Study on Self-Developing Reaction of High-Resolution Inorganic Electron Beam Resist
- Nanometer-Scale Direct Carbon Mask Fabrication Usirng Electron-Beam-Assisted Deposition
- Quench Characteristics and Operational Stability of the TOPAZ Thin Superconducting Solenoid
- Performance of the TOPAZ Thin Superconducting Solenoid Wound with Internal Winding Method
- High-Power 0.8 μm InGaAsP/InGaP/AlGaAs Single Quantum Well Lasers with Tensile-Strained InGaP Barriers
- Highly Reliable Operation of High-Power InGaAsP/InGaP/AlGaAs 0.8 μm Separate Confinement Heterostructure Lasers
- Development and Surface Evaluation of Large SiC X-Ray Mirrors for High-Brilliance Synchrotron Radiation
- Theoretical Studies of the X-Ray Mirror Surface Roughness
- Room Temperature Nanoimprint Technology Using Hydrogen Silsequjoxane (HSQ)
- 10 Channel Grating Polychromator for the Measurements of Electron Cyclotron Emission : Nuclear Science, Plasmas and Electric Discharges
- 10 Channel Grating Polychromator for the Measurements of Electron Cyclotron Emission
- Investigating Line-Edge Roughness in Calixarene Fine Patterns Using Fourier Analysis
- Improvement of Plasma-Assisted Molecular Beam Epitaxial Growth of Group III Nitrides on Si Controlling Radio Frequency Discharge Modes and Irradiation of Nitrogen Flux
- Formation of bulk gallium nitride(GaN) using a multi-cusp plasma-sputter ion source system (小特集テーマ 進展する窒化物半導体光・電子デバイスの現状)
- Formation of bulk gallium nitride (GaN) using a multi-cusp plasma-sputter ion source system (小特集テーマ:進展する窒化物半導体光・電子デバイスの現状)
- Simultaneous Measurements of Plasma Potential and Density Fluctuations in a Bumpy Torus by a Heavy Neutral Beam Probe
- Fabrication and Characterization of 14-nm-Gate-Length EJ-MOSFETs
- Proposal of Pseudo Source and Drain MOSFETs for Evaluating 10-nm Gate MOSFETs
- Correlation between Negative Hydrogen Ion Production and Work Function of Plasma Grid Surface in a Cesium-Introduced Volume-Production-Type Negative Hydrogen Ion Source
- A Proposal of a Hybrid Magnetic Probe
- Nanolithography Using a Chemically Amplified Negative Resist by Electron Beam Exposure
- Density Measurement of Negative Hydrogen Ions by DC Laser Photodetachment Method
- Effect of Surface and Growth Conditions for Formation of Textured Polycrystalline GaN Crystals by Reactive N2 Plasma
- Surface Modification of Narra Wood (Pterocarpus indicus) by Ion Shower Treatment
- An Investigation as to the Cause of Beam Asymmetry in a Compact Gas Discharge Ion Source: A Focus on Beam-Wall Interaction
- Charge-Transfer Cross Sections of Ground State He+ Ions in Collisions with He Atoms and Simple Molecules in the Energy Range below 4.0 keV
- Development of a 14 GHz Microwave H－ Source
- Correlation between Negative Hydrogen Ion Production and Work Function of Plasma Grid Surface in a Cesium-Introduced Volume-Production-Type Negative Hydrogen Ion Source