Unit-by-Unit Process of Bi_2Sr_2CuO_y, Film Growth with Molecular Beam Epitaxy by Separated Evaporation/Oxidation/Crystallization Technique
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概要
- 論文の詳細を見る
Thin films of Bi_2Sr_2CuO_y were grown with MBE (Molecular Beam Epitaxy) by the separated evaporation/oxidation/crystallization technique on a MgO (100) substrate. The proposed technique is the unit-by-unit process consisting of three steps: multilayer deposition of (Bi-Sr-Cu-Sr-Bi)×2, low-temperature oxidation (300℃) in low concentration O_3(O_2/O_3(0.3%)) atmosphere (5×10^<-5> Torr) and crystallization (750℃, 1×10^<-8> Torr). After growth of ten units, clear streaks on the RHEED pattern showing the twin structure and a fairly fine X-ray diffraction pattern were observed.
- 社団法人応用物理学会の論文
- 1992-09-15
著者
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宮下 和夫
北大院・水・機能性物質化学
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Okada Hiroyuki
Department Of Cardiology Musashino Red Cross Hospital
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Okada H
Univ. Toyama Toyama Jpn
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MIYASHITA Kazuo
Department of Bioresources Chemistry, Graduate School of Fisheries Science, Hokkaido University
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SHIBATA Miki
Faculty of Engineering, Toyama University
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Shibata M
Graduate School Of Science And Engineering University Of Toyama
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Shibata Miki
Department Of Electronic Engineering Toyama University
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SUZUKI Kouji
Department of Radiology Tsurumi Hospital
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Okada H
Faculty Of Engineering University Of Toyama
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Onnagawa Hiroyoshi
Department Of Electric And Electronic Engineering Faculty Of Engineering Toyama University
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KARAKI Tetsuya
Department of Electronics and Computer Science, Faculty of Engineering, Toyama University
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IWASHIMA Kenji
Department of Electronics and Computer Science, Faculty of Engineering, Toyama University
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Miyashita Kazuo
Department Of Bioresources Chemistry Graduate School Of Fisheries Sciences Hokkaido University
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Iwashima Kenji
Department Of Electronics And Computer Science Faculty Of Engineering Toyama University
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Karaki Tetsuya
Department Of Electronics And Computer Science Faculty Of Engineering Toyama University
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Suzuki Kouji
Department Of Electronics And Computer Science Faculty Of Engineering Toyama University
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Miyashita Kazuo
Department Of Bioresources Chemistry Graduate School Of Fisheries Science Hokkaido University
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Miyashita Kazuo
Department Of Bioengineering Graduate School Of Bioscience And Biotechnology Tokyo Institute Of Technology
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Suzuki Kouji
Department of Electrical Engineering, Tohoku University
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Shibata Miki
Department of Electric and Electronic Engineering, Toyama University, 3190 Gofuku, Toyama 930-8555, Japan
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