Hydrogen Content in a-SiC:H Films Prepared by Plasma Decomposition of Silane and Methane or Ethylene

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1984-07-20

著者

• OKAMOTO Hiroaki

  Faculty of Engineering Science, Osaka University

• HAMAKAWA Yoshihiro

  Faculty of Engineering Science, Osaka University

• Hamakawa Yoshihiro

  Faculty Of Science And Engineering Ritsumeikan University

• HASHIMOTO Yoshio

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University

• Hashimoto Yoshio

  Department Of Dermatology Asahikawa Medical College

• Okamoto Hiroaki

  Faculty Of Engineering Science Osaka University

• Fujimoto Fuminori

  College of General Education, University of Tokyo

• Ootuka Akio

  College of General Education, University of Tokyo

• Komaki Ken-ichiro

  College of General Education, University of Tokyo

• Iwata Yasushi

  College of General Education, University of Tokyo

• Yamane Isao

  Research Centre for Nuclear Science & Technology, University of Tokyo

• Yamashita Hiroshi

  Research Centre for Nuclear Science & Technology, University of Tokyo

• Tawada Yoshihisa

  Faculty of Engineering Science, Osaka University

• Nishimura Kunio

  Faculty of Engineering Science, Osaka University

• Nishimura Kazuki

  New Materials Research Center Sanyo Electric Co. Ltd.

• Ootuka Akio

  College Of Arts And Sciences University Of Tokyo

• Yamane I

  Research Centre For Nuclear Science & Technology University Of Tokyo:(present Address)national L

• Hamakawa Yoshihiro

  Faculty Of Engineering Science Osaka University

• Iwata Yasushi

  College Of General Education University Of Tokyo

• Nishimura K

  New Materials Research Center Sanyo Electric Co. Ltd.

• Tawada Yoshihisa

  Faculty Of Engineering Science Osaka University:(present Address)central Research Laboratory Kanegaf

• KOMAKI Ken-ichiro

  University of Tokyo

• Komaki K

  Univ. Tokyo

• Kuroki Kenro

  Institute Of Physics Graduate School Of Arts And Sciences University Of Tokyo

• Komaki Ken-ichiro

  College Of Arts And Sciences University Of Tokyo

• Nishimura Kohsuke

  Kdd R&d Laboratories

• Fujimoto F

  Toyo Kasei Kogyo Co. Ltd. Osaka

• Fujimoto F

  College Of Arts And Sciences University Of Tokyo

• Fujimoto Fuminori

  College Of General Education University Of Tokyo

• Hamakawa Yoshihiro

  Faculty Of Engineering Osaka University

• Yamashita H

  Teikyo Univ. Tokyo Jpn

• Hashimoto Yoshio

  Department Of Dairy And Meat Science Faculty Of Agriculture Hokkaido University

• Hashimoto Yoshio

  Department Of Anesthesiology University Of Hirosaki School Of Medicine

• Fujimoto Fuminori

  College of Arts and Sciences,University of Tokyo

• FUJIMOTO Fuminori

  College of Arts and Sciences, University of Tokyo:(Present address)Institute of Scientific and Industrial Research, Osaka University

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