Fabrication process of non arcing power MEMS relay(Session 3 : Relays)
スポンサーリンク
概要
- 論文の詳細を見る
We proposed a new electric contact device that suppresses the arc phenomena. Electric contact functions are divided into energizing and switching. Switching contacts are the multi electrodes and each electrode current is suppressed by series resistance. For realizing of the multi contacting, cantilever beam array electrodes were formed on silicon substrate using Micro-electromechanical Systems (MEMS) technology. Finite element method was used for optimizing structure. Fabrication process of cantilever was examined. 0.97A of contact current was broken by the Au plating electrodes.
- 2004-10-14
著者
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SAWA Koichiro
Keio University
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Sawa Koichiro
Nippon Institute of Technology
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Satoh Yoshio
Fujitsu Laboratories Ltd.
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Nakatani Tadashi
Fujitsu Laboratories Ltd.
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YONEZAWA Yu
Ishinomaki Senshu University
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WAKATSUKI Noboru
Ishinomaki Senshu University
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Yonezawa Yu
Fujitsu Media Device Ltd. Akashi‐shi Jpn
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Sawa Koichiro
Keio Univ. Yokohama‐shi Jpn
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Wakatsuki Noboru
Ishinomaki Senshu University Faculty Of Science And Engineering
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Wakatsuki Noboru
Ishinomaki Senshu Univ. Miyagi Jpn
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SATOH Yoshio
FUJITSU LABORATORIES LIMITED, Peripheral System Laboratories
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