Fabrication Process of Nonarcing Power MEMS Switch(Relays and Switches, <Special Section>IS-EMD2004-Recent Development of Electro-Mechanical Devices)
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概要
- 論文の詳細を見る
We proposed a new electric contact device that suppresses the arc phenomena. The functions of electric contacts are divided into energizing and switching for arc suppression. Switching contacts consist of multielectrodes and each electrode current is suppressed by the series resistance. For realization of multicontacting, cantilever beam array electrodes were formed on a silicon substrate using micro-electromechanical systems (MEMS) technology. The finite element method was used to optimize the structure. The fabrication process of the cantilever was examined. Au-Au contact current of 0.97 A was broken without arc ignition.
- 2005-08-01
著者
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SAWA Koichiro
Keio University
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Sawa Koichiro
Nippon Institute of Technology
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Satoh Yoshio
Fujitsu Laboratories Ltd.
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Nakatani Tadashi
Fujitsu Laboratories Ltd.
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YONEZAWA Yu
Ishinomaki Senshu University
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WAKATSUKI Noboru
Ishinomaki Senshu University
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Yonezawa Yu
Fujitsu Media Device Ltd. Akashi‐shi Jpn
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Sawa Koichiro
Keio Univ. Yokohama‐shi Jpn
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Wakatsuki Noboru
Ishinomaki Senshu University Faculty Of Science And Engineering
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Wakatsuki Noboru
Ishinomaki Senshu Univ. Miyagi Jpn
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SATOH Yoshio
FUJITSU LABORATORIES LIMITED, Peripheral System Laboratories
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