MEMS Variable Capacitor Using Cross Membranes for RF Band
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概要
- 論文の詳細を見る
This paper describes a novel design of MEMS variable capacitor with high quality factor and wide tuning range. The proposed MEMS variable capacitor is composed of two cross movable electrodes and one dielectric layer between them. The fabrication process does not require any complex processes, such as wafer transfer, wafer backside etching, special planarization or supercritical point drying. The capacitor has tuning range of 330% at 5 V bias voltage, and an overall quality factor of 52 at 2 pF and 2.4 GHz.
- 2006-05-01
著者
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Nguyen Anh
Fujitsu Laboratories Ltd.
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IMAI Masahiko
Fujitsu Laboratories Ltd.
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Satoh Yoshio
Fujitsu Laboratories Ltd.
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Imai Masahiko
Fujitsu Ltd.
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UEDA Satoshi
Fujitsu Laboratories Ltd.
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Nakatani Tadashi
Fujitsu Laboratories Ltd.
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Nakatani Tadashi
Fujitsu Ltd.
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SHIMANOUCHI Takeaki
Fujitsu Ltd.
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SAWAKI Ippei
Fujitsu Laboratories Ltd.
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Satoh Yoshio
Fujitsu Ltd.
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Ueda Satoshi
Fujitsu Ltd.
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SATOH Yoshio
FUJITSU LABORATORIES LIMITED, Peripheral System Laboratories
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