Experimental Studies on Acoustic Energy Loss in Surface Acoustic Wave Filters Using Grating Waveguides : Structure and Mechanical and Thermal Properties of Condensed Matter

概要

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The acoustic energy loss in surface acoustic wave filters using grating waveguides is investigated experimentally. The propagation loss in the waveguide formed on a ST-cut quartz with aluminum grids, which have the period detuned from that of the Bragg condition, is evaluated to be small as 2 × 10^<-3> dB/wavelength. However, it is revealed that the extra energy loss arises with a short waveguide length and before surface acoustic waves (SAWs) launched by the interdigital transducer (IDT) enter the waveguide. Based on the experimental studies on these extra energy losses, the insertion loss in the refiector filter using a SAW grating waveguide is reduced by 2 dB by increasing the aluminum film thickness.
社団法人応用物理学会の論文
2001-01-15