F206 CZ-Siメルト表面のスポークパターン形成における表面張力起因対流の役割(オーガナイズドセッション17 : 材料およびデバイス製造の熱工学)

概要

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Spoke patterns on shallow silicon melts and polygonal cellular patterns on the surface of Czochralski silicon melts were observed by CCD camera. The dark stripes of the spoke patterns in the CCD images indicate the lower temperatures. We found that the number of spokes depends on the depth of the silicon melt. When the thermocapillary flow in a 3-mm-deep silicon melt was dominant, a spoke pattern was clearly observed on the surface. On a CZ silicon surface of a 200-mm-deep melt not under a vertical magnetic field, polygonal-shape patterns were observed to move toward the melt center. However, under a vertical magnetic field, the polygonal patterns only changed to be more longitudinal but did not disappear. These observations indicate that the surface flow of a CZ melt and its instability cannot be fully suppressed by a magnetic field and that the surface flow plays a significant role in forming the surface patterns.
一般社団法人日本機械学会の論文
2001-11-03