B312 溶融半導体シリコンにおけるマランゴ二対流の不安定性

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Surface-tension-driven flow of molten silicon was investigated under microgravity and on earth for a liquid bridge configuration. In order to investigate instability structure the following observations were carried out : temperature oscillation and its phase relationship (thermocouples), oscillation of a molten surface (phase shift interferometry), oscillation of melt/solid interface position (laser microscope). Instability structure shows azimuthal wave number m, depending on an aspect ratio of a liquid bridge : Г=h (height)/r (radius). Surface-tension-driven-flow shows marked dependence on oxygen partial pressure of an ambient atmosphere. This is due to oxygen partial pressure dependence of temperature coefficient of surface tension. However, it is almost impossible to measure oxygen partial pressure directly at the melt surface. In order to estimate the oxygen partial pressure at the melt surface, we measured oxygen partial pressure both at the inlet and exit of the furnace simultaneously and calibrated them using a model proposed by Ratto et al.
日本流体力学会の論文
2002-07-23