127 非接触大型超精密ステージの 2 自由度 H_∞ 制御

概要

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Recently, the requirements for the control performance of X-Y stage have been increased. Especially the suppression of stage vibration is necessary to improve the control performance. Therefore, the stages and its surroundings are going harder and heavier. But that makes control performance bad. Because the frequencies of the uncertainty mode are getting lower and that limit the control bandwidth. This research aims at finding solution of this problem by changing design method of controller and evaluation method of control performance. Conventional design method of the controller of the X-Y stage is manual work and engineers never use any mathmatical models. It is same thing when the control performances are evaluated. In this research, firstly we obtain a mathmatical model of the X-Y stage, especially FEM analysis is used. Secondly, we design a controller which satisfies disturbance rejection and robust stability by using H_∞ control technique. We also use the two-degree-of freedom control method to improve the time response. The control performances are evaluated by the computer simulation with FEM model. Form these results, we could show the effectiveness of our proposed method.
社団法人日本機械学会の論文
2000-09-01