積層PZT素子を用いた超高速電気油圧サーボ弁 : ソフトウエアによるヒステリシス特性補償

概要

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In a high-speed electrohydraulic servo control system, servo valves are mainly used to drive actuators, and the limit of the response of the system is dependent on the servo valves. The aim of this study is to develop an ultra high-speed servo valve with the spool displacement of 30 micrometers and the bandwidth over 5kHz. Piezoelectric devices have the potential to drive valves in quick response. However, as is well known, the devices have the disadvantage of hysteresis between applied voltage and output force. In this study, commercially available multilayered piezodevices, are used to drive the spool of the valve directly. The hysteresis is removed by introducing an inverse hysteresis element implemented on microcomputers and operated in real time. In this case, we developed an element to operate at the sampling frequency of 50kHz. In addition, we develop a method to drive piezoelectric ceramic devices at high speed, and improve damping characteristics of the spool valve. As a result, a servo valve with the bandwidth over 5kHz is successfully developed.
一般社団法人日本機械学会の論文
1991-01-25