均一系ER流体を作動流体としたマイクロバルブ

概要

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To realize practical high power micromachines using fluid power with high power density, microvalves that can be mounted on such micromachines are required. In this study, a new microvalve using homogeneous ER fluids called the micro ER valve is proposed and fabricated. The homogeneous ER (Electro-rheological) fluids such as nematic liquid crystals whose apparent viscosity its controlled by the applied electric field strength are expected to be suitable for micromachines because they have no particles in them. The proposed micro ER valve features simple, compact and reliable structure without moving parts. Firstly, a 2-port valve with a pair of parallel plate electrodes is fabricated and the static and dynamic characteristics are experimentally invstigated. The viscosity change rate of 2.7 and the rise time of about 150 ms are obtained. Secondly, based on the obtained results, a 3-port micro ER valve with 4.5 mm in diameter and 5.2 mm in height is designed and fabricated and the basic characteristics are experimentally investigated. With electric field strength change of 3.0 kV/mm and supply pressure of 0.34 MPa, the controllable pressure of 0.13 MPa and the bandwidth of 0.6 Hz are realized. Also an application to position control of a bellows microactuator is performed.
一般社団法人日本機械学会の論文
2000-09-25